Abstract
A sensing section has a support member having a recess formed thereon, and a floating region disposed on the support member and formed by a recess. The sensing section has a slit through which the medium to be measured passes is formed in a portion exposed to the medium to be measured. A protective film made of a material having higher liquid repellency than that of the sensing section or more lyophilic than the sensing section is provided in the slit while maintaining a state in which the medium to be measured passes.
Full Text
What is claimed is:
A sensing section has a support member having a recess formed thereon, and a floating region disposed on the support member and formed by a recess. The sensing section has a slit through which the medium to be measured passes is formed in a portion exposed to the medium to be measured. A protective film made of a material having higher liquid repellency than that of the sensing section or more lyophilic than the sensing section is provided in the slit while maintaining a state in which the medium to be measured passes.
Timeline
Filed
02/19/2026Published
06/25/2026Granted
Not AvailableIPC Codes(3)
G01L 9/08:by making use of piezoelectric devices
G01L 9/00:Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means (measuring differences of two or more pressure values G01L 13/00; measuring two or more pressure values simultaneously G01L 15/00)
G01L 19/06:Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa