There is provided a ceramic heater including: a ceramic plate including a first surface, and a second surface; a first RF/ESC electrode embedded in the ceramic plate; a second RF/ESC electrode electrically connected to the first RF/ESC electrode, and embedded at a depth position farther from the first surface than the first RF/ESC electrode; an RF/ESC rod including one end electrically connected to the second RF/ESC electrode; an RF/ESC terminal hole being a bottomed hole into which a front end part of the RF/ESC rod is inserted; and a heater circuit embedded at a depth position closer to the second surface than the second RF/ESC electrode. A distance between a center line of the first RF/ESC electrode and that of the second RF/ESC electrode is 2 to 7 mm. A distance from the first surface to a hole bottom of the RF/ESC terminal hole is 4 to 9 mm.