/Treatment Liquid, Treatment Method For Object To Be Treated, Treatment Method Of Pad, And Manufacturing Method Of Electronic Device
Abstract
An object of the present invention is to provide a treatment liquid which can suppress corrosion of tungsten or molybdenum, has excellent organic residue removability, and further has excellent iron oxide residue removability. The treatment liquid of the present invention contains a specific compound represented by Formula (1), and at least one phosphonic acid compound selected from the group consisting of phosphonic acid and an organic phosphonic acid, in which a mass ratio of a content of the specific compound to a content of the phosphonic acid compound is 0.001 to 20.0.
Full Text
What is claimed is:
An object of the present invention is to provide a treatment liquid which can suppress corrosion of tungsten or molybdenum, has excellent organic residue removability, and further has excellent iron oxide residue removability. The treatment liquid of the present invention contains a specific compound represented by Formula (1), and at least one phosphonic acid compound selected from the group consisting of phosphonic acid and an organic phosphonic acid, in which a mass ratio of a content of the specific compound to a content of the phosphonic acid compound is 0.001 to 20.0.
Timeline
Filed
02/20/2026Published
06/25/2026Granted
Not AvailableIPC Codes(8)
C11D 1/40:Monoamines or polyamines; Salts thereof
C11D 3/00:Other compounding ingredients of detergent compositions covered in group
C11D 3/20:containing oxygen