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/Method For Reworking An Optical Element, Optical Element And Optical System
Abstract

A method for reworking an optical element, in particular for microlithography, wherein the optical element has a first functional layer (203) which is optionally located on a figure individualised with figure processing for use in a first optical system or on an existing carrier layer (202). The method includes: over-coating the first functional layer (203) with an adjustment layer system (204), applying a carrier layer (205) onto the adjustment layer system (204), determining a setpoint wavefront effect for a new use of the optical element, carrying out a layer manipulation depending on the setpoint wavefront effect and applying a second functional layer (206) onto the carrier layer (205), wherein the optical element (200) is a lens or a wavefront correction element.

Full Text

What is claimed is:

A method for reworking an optical element, in particular for microlithography, wherein the optical element has a first functional layer (203) which is optionally located on a figure individualised with figure processing for use in a first optical system or on an existing carrier layer (202). The method includes: over-coating the first functional layer (203) with an adjustment layer system (204), applying a carrier layer (205) onto the adjustment layer system (204), determining a setpoint wavefront effect for a new use of the optical element, carrying out a layer manipulation depending on the setpoint wavefront effect and applying a second functional layer (206) onto the carrier layer (205), wherein the optical element (200) is a lens or a wavefront correction element.
Timeline
Filed
02/20/2026
Published
06/25/2026
Granted
Not Available
IPC Codes(2)
G03F 7/00:Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P 76/00, H05K)
G01N 21/956:Inspecting patterns on the surface of objects