Abstract
A processing tool including: a transport tunnel having an end with a port; at least one module communicably coupled to the transport tunnel through the at least one port; and at least one transport cart levitated within the transport tunnel so as to be movably disposed within the transport tunnel, each of the at least one transport cart includes a base and a substrate holder coupled to the base so that the substrate holder is fixed in orientation relative to the base; where, with the at least one transport cart positioned within the transport tunnel adjacent the end, the substrate holder is configured to extend beyond the end for transferring substrates between the at least one transport cart and the at least one module.
Full Text
What is claimed is:
A processing tool including: a transport tunnel having an end with a port; at least one module communicably coupled to the transport tunnel through the at least one port; and at least one transport cart levitated within the transport tunnel so as to be movably disposed within the transport tunnel, each of the at least one transport cart includes a base and a substrate holder coupled to the base so that the substrate holder is fixed in orientation relative to the base; where, with the at least one transport cart positioned within the transport tunnel adjacent the end, the substrate holder is configured to extend beyond the end for transferring substrates between the at least one transport cart and the at least one module.
Timeline
Filed
02/27/2026Published
07/02/2026Granted
Not AvailableIPC Codes(6)
H10P 72/76:using mechanical means, e.g. clamps or pinches
B25J 9/04:by rotating at least one arm, excluding the head movement itself, e.g. cylindrical co-ordinate type or polar co-ordinate type
B25J 11/00:Manipulators not otherwise provided for