Abstract
A MEMS structure that can amplify displacement of attached blocker in a small form factor is disclosed. The displacement amplification structure comprises two deformable beams that are anchored to either side of a pivoting body with a defined distance. The other ends of the beams are attached to actuators that can generate small translation movement in the opposing direction over a radius and produce torque on the pivoting body and causing it to rotate.
Full Text
What is claimed is:
A MEMS structure that can amplify displacement of attached blocker in a small form factor is disclosed. The displacement amplification structure comprises two deformable beams that are anchored to either side of a pivoting body with a defined distance. The other ends of the beams are attached to actuators that can generate small translation movement in the opposing direction over a radius and produce torque on the pivoting body and causing it to rotate.
Timeline
Filed
03/06/2026Published
07/09/2026Granted
Not AvailableIPC Codes(2)
B81B 3/00:Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (takes precedence B81B 5/00)
G02B 26/02:for controlling the intensity of light