Abstract
A semiconductor structure includes a substrate, a fixed structure disposed over the substrate, a floating structure coupled to the fixed structure and separated from the substrate, and a capping layer disposed over a surface of the floating structure. The second portion of the floating structure and the fixed structure include a same material.
Full Text
What is claimed is:
A semiconductor structure includes a substrate, a fixed structure disposed over the substrate, a floating structure coupled to the fixed structure and separated from the substrate, and a capping layer disposed over a surface of the floating structure. The second portion of the floating structure and the fixed structure include a same material.
Timeline
Filed
03/12/2026Published
07/16/2026Granted
Not AvailableIPC Codes(1)
B81B 3/00:Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (takes precedence B81B 5/00)