Abstract
A mapping device includes: a substrate engraved with an alignment pattern; an electrostatic chuck under the substrate and in contact with the substrate; and an anti-separation frame on the substrate and preventing the substrate from being separated.
Full Text
What is claimed is:
A mapping device includes: a substrate engraved with an alignment pattern; an electrostatic chuck under the substrate and in contact with the substrate; and an anti-separation frame on the substrate and preventing the substrate from being separated.
Timeline
Filed
03/16/2026Published
07/16/2026Granted
Not AvailableIPC Codes(2)
H05K 13/08:Monitoring manufacture of assemblages
H05K 13/00:Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components