A semiconductor structure includes a region of semiconductor material of a first conductivity type. A doped region of a second conductivity type is within the region of semiconductor material at a first depth. A semiconductor device is in a first portion of the region of semiconductor material and includes a first current carrying region of the second conductivity type and a second current carrying region. A PN diode is in a second portion of the region of semiconductor material and includes a cathode region of the second conductivity type and anode region of the first conductivity type. The cathode region is coupled to the first current carrying region, the anode region is coupled to the doped region, and the doped region is configured to electrically isolate the semiconductor device from region of semiconductor material below the doped region in response to a forward bias applied to the semiconductor device.