/Forming An Electronic Device, Such As A Jbs Or Mps Diode, Based On 3c-sic, And 3c-sic Electronic Device
Abstract
A method for manufacturing an electronic device includes forming, at a front side of a solid body of 4H-SiC having a first electrical conductivity, at least one implanted region having a second electrical conductivity opposite to the first electrical conductivity; forming, on the front side, a 3C-SiC layer; and forming, in the 3C-SiC layer, an ohmic contact region which extends through the entire thickness of the 3C-SiC layer, up to reaching the implanted region. A silicon layer may be present on the 3C-SiC layer; in this case, the ohmic contact also extends through the silicon layer.
Full Text
What is claimed is:
A method for manufacturing an electronic device includes forming, at a front side of a solid body of 4H-SiC having a first electrical conductivity, at least one implanted region having a second electrical conductivity opposite to the first electrical conductivity; forming, on the front side, a 3C-SiC layer; and forming, in the 3C-SiC layer, an ohmic contact region which extends through the entire thickness of the 3C-SiC layer, up to reaching the implanted region. A silicon layer may be present on the 3C-SiC layer; in this case, the ohmic contact also extends through the silicon layer.
Timeline
Filed
03/12/2026Published
07/16/2026Granted
Not AvailableIPC Codes(6)
H10D 62/832:being Group IV materials comprising two or more elements, e.g. SiGe
H10D 8/01:Manufacture or treatment
H10D 8/60:Schottky-barrier diodes