/Method For Manufacturing Semiconductor Substrate, Method For Manufacturing Processed Semiconductor Substrate, And Release Composition
Abstract
The present invention provides a semiconductor substrate cleaning method including a step of removing an adhesive layer provided on a semiconductor substrate by use of a remover composition which contains a solvent but no salt, the solvent containing a C8 to C10 linear-chain, saturated, aliphatic hydrocarbon compound. As the C8 to C10 linear-chain, saturated, aliphatic hydrocarbon compound, a linear-chain hydrocarbon compound is used.
Full Text
What is claimed is:
The present invention provides a semiconductor substrate cleaning method including a step of removing an adhesive layer provided on a semiconductor substrate by use of a remover composition which contains a solvent but no salt, the solvent containing a C8 to C10 linear-chain, saturated, aliphatic hydrocarbon compound. As the C8 to C10 linear-chain, saturated, aliphatic hydrocarbon compound, a linear-chain hydrocarbon compound is used.
Timeline
Filed
03/19/2026Published
07/23/2026Granted
Not AvailableIPC Codes(2)
C11D 7/50:Solvents
H10P 70/00:Cleaning of wafers, substrates or parts of devices