Abstract
A method includes receiving data indicative of an input value of a setting for calibration of an equipment parameter of a process tool of a plurality of process tools of a manufacturing system. The method further includes determining, based on the data, a predicted value of a metric corresponding to the equipment parameter. The method further includes updating the setting for calibration of the equipment parameter based on the input value and the predicted value.
Full Text
What is claimed is:
A method includes receiving data indicative of an input value of a setting for calibration of an equipment parameter of a process tool of a plurality of process tools of a manufacturing system. The method further includes determining, based on the data, a predicted value of a metric corresponding to the equipment parameter. The method further includes updating the setting for calibration of the equipment parameter based on the input value and the predicted value.
Timeline
Filed
03/25/2026Published
07/23/2026Granted
Not AvailableIPC Codes(3)
G06N 20/00:Machine learning
G05B 13/02:electric
G05B 13/04:involving the use of models or simulators