/Gas Concentration Sensor And Sensor Calibration Without Use Of A Target Gas
Abstract

A sensor calibration system includes a first gas concentration sensor that measures a thermal conductivity of a target gas, a second gas concentration sensor that measures the thermal conductivity of the target gas, and a calibration circuit. The first gas concentration sensor includes a first measurement chamber. The second gas concentration sensor includes a second measurement chamber. The calibration circuit is configured to, while the first measurement chamber contains a measurement gas, a pressure inside the first measurement chamber is varied, and a temperature inside the first measurement chamber is fixed, acquire a first plurality of measurements from the first gas concentration sensor. The calibration circuit is configured to, while the second measurement chamber contains the measurement gas, a pressure inside the second measurement chamber is varied, and a temperature inside the second measurement chamber is fixed, acquire a second plurality of measurements from the second gas concentration sensor.

Full Text

What is claimed is:

A sensor calibration system includes a first gas concentration sensor that measures a thermal conductivity of a target gas, a second gas concentration sensor that measures the thermal conductivity of the target gas, and a calibration circuit. The first gas concentration sensor includes a first measurement chamber. The second gas concentration sensor includes a second measurement chamber. The calibration circuit is configured to, while the first measurement chamber contains a measurement gas, a pressure inside the first measurement chamber is varied, and a temperature inside the first measurement chamber is fixed, acquire a first plurality of measurements from the first gas concentration sensor. The calibration circuit is configured to, while the second measurement chamber contains the measurement gas, a pressure inside the second measurement chamber is varied, and a temperature inside the second measurement chamber is fixed, acquire a second plurality of measurements from the second gas concentration sensor.
Timeline
Filed
04/10/2026
Published
07/23/2026
Granted
Not Available
IPC Codes(2)
G01N 33/00:Investigating or analysing materials by specific methods not covered by groups
G01N 25/18:by investigating thermal conductivity (by calorimetry G01N 25/20; by measuring change of resistance of an electrically-heated body G01N 27/18)