Abstract
A piezoelectric device includes a support including a support substrate, a piezoelectric layer having a thickness in a first direction and provided on a main surface of the support, and a functional electrode provided on a main surface of the piezoelectric layer. The piezoelectric layer includes first and second piezoelectric films stacked on each other. The polarization directions of the first and second piezoelectric films intersect each other. A displacement direction of a main wave of the first piezoelectric film and the displacement direction of a main wave of the second piezoelectric film are parallel directions.
Full Text
What is claimed is:
A piezoelectric device includes a support including a support substrate, a piezoelectric layer having a thickness in a first direction and provided on a main surface of the support, and a functional electrode provided on a main surface of the piezoelectric layer. The piezoelectric layer includes first and second piezoelectric films stacked on each other. The polarization directions of the first and second piezoelectric films intersect each other. A displacement direction of a main wave of the first piezoelectric film and the displacement direction of a main wave of the second piezoelectric film are parallel directions.
Timeline
Filed
03/19/2026Published
07/23/2026Granted
Not AvailableIPC Codes(2)
H03H 9/02:Details
H03H 9/54:comprising resonators of piezoelectric or electrostrictive material (comprising resonators using surface acoustic waves H03H 9/64)