/Acoustic Wave Filter Device And Method Of Manufacturing Acoustic Wave Filter Device
Abstract

An acoustic wave filter device including resonators includes a support including a support substrate with a thickness in a first direction, first and second piezoelectric layers located on a main surface of the support at different positions, and functional electrodes of the resonators on the first piezoelectric layer and the second piezoelectric layer. The resonators include a first resonator in the first piezoelectric layer and a second resonator in the second piezoelectric layer. The first piezoelectric layer includes first and second piezoelectric films that are laminated. Polarization directions of the first and second piezoelectric films differ from each other. A number of piezoelectric films included in the second piezoelectric layer is smaller than a number of the piezoelectric films included in the first piezoelectric layer.

Full Text

What is claimed is:

An acoustic wave filter device including resonators includes a support including a support substrate with a thickness in a first direction, first and second piezoelectric layers located on a main surface of the support at different positions, and functional electrodes of the resonators on the first piezoelectric layer and the second piezoelectric layer. The resonators include a first resonator in the first piezoelectric layer and a second resonator in the second piezoelectric layer. The first piezoelectric layer includes first and second piezoelectric films that are laminated. Polarization directions of the first and second piezoelectric films differ from each other. A number of piezoelectric films included in the second piezoelectric layer is smaller than a number of the piezoelectric films included in the first piezoelectric layer.
Timeline
Filed
03/19/2026
Published
07/23/2026
Granted
Not Available
IPC Codes(6)
H03H 9/56:Monolithic crystal filters
H03H 3/02:for the manufacture of piezoelectric or electrostrictive resonators or networks (takes precedence H03H 3/08)
H03H 9/05:Holders or supports