/Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Producing Electronic Device
Abstract
An actinic ray-sensitive or radiation-sensitive resin composition contains a resin having a repeating unit that generates an acid upon irradiation with an actinic ray or a radiation, and a solvent, the repeating unit includes a cation and an anion that is bonded to a molecular chain of the resin, and a content of the repeating unit relative to a total resin content of the actinic ray-sensitive or radiation-sensitive resin composition is 80 mass % or more.
Full Text
What is claimed is:
An actinic ray-sensitive or radiation-sensitive resin composition contains a resin having a repeating unit that generates an acid upon irradiation with an actinic ray or a radiation, and a solvent, the repeating unit includes a cation and an anion that is bonded to a molecular chain of the resin, and a content of the repeating unit relative to a total resin content of the actinic ray-sensitive or radiation-sensitive resin composition is 80 mass % or more.
Timeline
Filed
03/19/2026Published
07/23/2026Granted
Not AvailableIPC Codes(1)
G03F 7/039:Macromolecular compounds which are photodegradable, e.g. positive electron resists (takes precedence G03F 7/075; macromolecular quinonediazides G03F 7/023)