Abstract
A gas injection system, a reactor system including the gas injection system, and methods of using the gas injection system and reactor system are disclosed. The gas injection system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas injection system coupled to a reaction chamber.
Full Text
What is claimed is:
A gas injection system, a reactor system including the gas injection system, and methods of using the gas injection system and reactor system are disclosed. The gas injection system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas injection system coupled to a reaction chamber.
Timeline
Filed
03/19/2026Published
07/23/2026Granted
Not AvailableIPC Codes(5)
C23C 16/52:Controlling or regulating the coating process
B01J 4/00:Feed devices; Feed or outlet control devices (feed or outlet devices for pressure vessels B01J 3/02)
C23C 16/44:characterised by the method of coating (takes precedence C23C 16/04)