An optical device for machining a sample via laser radiation in at least two machining steps. The device comprises at least one beam splitter, a first optical machining device, and a second optical machining device. The beam splitter is arranged such that a laser beam can be split into at least two partial beams. The partial beams can be oriented towards the sample such that the sample is machined in two machining steps. The optical device comprises a component for changing the power density, so that the power density of the first partial beam is greater than the power density of the second partial beam. The invention also relates to an optical system comprising the optical device, to a method for machining the sample, and to a sample machined via the optical device.