A transporter for transporting an object includes a compartment to accommodate the object; an opening portion connectable to a processing apparatus for a substrate; a gate valve to open and close the opening portion; a robotic arm including an end effector, the robotic arm to transfer the object with the end effector to and from the processing apparatus through the opening portion; a first connector structure including a first connector to receive power supplied to the transporter from an external apparatus external to the transporter; a drive to advance the first connector structure toward a second connector structure in the external apparatus to connect the first connector structure to the second connector structure; mover to move the transporter; and controller circuitry to control the drive, and cause the drive to connect the first connector structure to the second connector structure before the opening portion is connected to the processing apparatus.
Full Text
What is claimed is: