/Wafer Placement Table
Abstract

A wafer placement table includes: a ceramic plate incorporating an electrode; a base plate having a refrigerant flow path therein; a stepped hole penetrating the base plate in an up-down direction and having an upper hole portion, a lower hole portion, and a hole step portion; an insulating tube inserted into the upper hole portion; a resin tube inserted into the lower hole portion, having an upper surface bonded to the hole step portion, and having a larger diameter than the insulating tube; and a power feeding member having an upper surface connected to the electrode and inserted into the insulating tube and the resin tube. On the upper surface of the resin tube, a convex member for securing a gap between the upper surface of the resin tube and the hole step portion of the stepped hole is provided, and the adhesive layer is filled in the gap.

Full Text

What is claimed is:

A wafer placement table includes: a ceramic plate incorporating an electrode; a base plate having a refrigerant flow path therein; a stepped hole penetrating the base plate in an up-down direction and having an upper hole portion, a lower hole portion, and a hole step portion; an insulating tube inserted into the upper hole portion; a resin tube inserted into the lower hole portion, having an upper surface bonded to the hole step portion, and having a larger diameter than the insulating tube; and a power feeding member having an upper surface connected to the electrode and inserted into the insulating tube and the resin tube. On the upper surface of the resin tube, a convex member for securing a gap between the upper surface of the resin tube and the hole step portion of the stepped hole is provided, and the adhesive layer is filled in the gap.
Timeline
Filed
03/26/2026
Published
07/30/2026
Granted
Not Available
IPC Codes(2)
H10P 72/72:using electrostatic chucks
H01J 37/32:Gas-filled discharge tubes (heating by discharge H05B)