Abstract
An aligner station includes an aligner stage configured to support a carrier for a process kit ring. The aligner station further includes a lift mechanism configured to lift the process kit ring from the carrier. The aligner station, using the aligner stage and the lift mechanism, is configured to independently align the process kit ring and the carrier to a target orientation.
Full Text
What is claimed is:
An aligner station includes an aligner stage configured to support a carrier for a process kit ring. The aligner station further includes a lift mechanism configured to lift the process kit ring from the carrier. The aligner station, using the aligner stage and the lift mechanism, is configured to independently align the process kit ring and the carrier to a target orientation.
Timeline
Filed
03/26/2026Published
07/30/2026Granted
Not AvailableIPC Codes(3)
H01J 37/32:Gas-filled discharge tubes (heating by discharge H05B)
B25J 11/00:Manipulators not otherwise provided for
H01J 37/244:Detectors; Associated components or circuits therefor