/Composite Wafer And Method For Producing Composite Wafer
Abstract

A composite wafer includes in this order: a support substrate; an amorphous layer; and a SiO2-containing substrate. The amorphous layer is in contact with a first adjacent layer and a second adjacent layer, and includes an element included in each of the first adjacent layer and the second adjacent layer. A composite wafer of another embodiment of the present disclosure includes in this order: a support substrate; an amorphous layer; and a SiO2-containing substrate having a OH group content of 100 ppm or less. The amorphous layer is in contact with a first adjacent layer and a second adjacent layer, and includes an element included in each of the first adjacent layer and the second adjacent layer. A method of producing a composite wafer of an embodiment of the present disclosure includes directly joining a support substrate and a SiO2-containing bulk.

Full Text

What is claimed is:

A composite wafer includes in this order: a support substrate; an amorphous layer; and a SiO2-containing substrate. The amorphous layer is in contact with a first adjacent layer and a second adjacent layer, and includes an element included in each of the first adjacent layer and the second adjacent layer. A composite wafer of another embodiment of the present disclosure includes in this order: a support substrate; an amorphous layer; and a SiO2-containing substrate having a OH group content of 100 ppm or less. The amorphous layer is in contact with a first adjacent layer and a second adjacent layer, and includes an element included in each of the first adjacent layer and the second adjacent layer. A method of producing a composite wafer of an embodiment of the present disclosure includes directly joining a support substrate and a SiO2-containing bulk.
Timeline
Filed
03/26/2026
Published
07/30/2026
Granted
Not Available
IPC Codes(5)
B32B 9/04:comprising such substance as the main or only constituent of a layer, next to another layer of a specific substance
B32B 9/00:Layered products essentially comprising a particular substance not covered by groups
B32B 17/06:comprising glass as the main or only constituent of a layer, next to another layer of a specific substance