Abstract
A capacitor includes metallic tantalum and a dielectric layer. The dielectric layer covers the metallic tantalum and includes a tantalum oxide. The dielectric layer includes fluorine and phosphorus. The dielectric layer includes, for example, a first portion and a second portion. The first portion is a portion separated from the metallic tantalum in a thickness direction of the dielectric layer. The second portion is a portion in contact with the metallic tantalum in the thickness direction of the dielectric layer.
Full Text
What is claimed is:
A capacitor includes metallic tantalum and a dielectric layer. The dielectric layer covers the metallic tantalum and includes a tantalum oxide. The dielectric layer includes fluorine and phosphorus. The dielectric layer includes, for example, a first portion and a second portion. The first portion is a portion separated from the metallic tantalum in a thickness direction of the dielectric layer. The second portion is a portion in contact with the metallic tantalum in the thickness direction of the dielectric layer.
Timeline
Filed
03/26/2026Published
07/30/2026Granted
Not AvailableIPC Codes(1)
H01G 9/07:Dielectric layers