/Semiconductor Device
Abstract

A semiconductor device includes a chip having a principal surface, a first conductivity type drift region formed at a surface layer portion of the principal surface, a trench electrode type gate structure formed on the principal surface such as to be placed in the drift region, and a second conductivity type well region formed along a bottom wall of the gate structure in a region below the gate structure in the drift region, wherein the well region includes a plurality of first well regions each of which is a first well region having a first bottom portion having a first depth and which are formed at an interval of a first interval from each other in a depth direction of the gate structure, and the first well regions adjacent each other face each other in the depth direction of the gate structure across a portion of the drift region.

Full Text

What is claimed is:

A semiconductor device includes a chip having a principal surface, a first conductivity type drift region formed at a surface layer portion of the principal surface, a trench electrode type gate structure formed on the principal surface such as to be placed in the drift region, and a second conductivity type well region formed along a bottom wall of the gate structure in a region below the gate structure in the drift region, wherein the well region includes a plurality of first well regions each of which is a first well region having a first bottom portion having a first depth and which are formed at an interval of a first interval from each other in a depth direction of the gate structure, and the first well regions adjacent each other face each other in the depth direction of the gate structure across a portion of the drift region.
Timeline
Filed
03/27/2026
Published
07/30/2026
Granted
Not Available
IPC Codes(3)
H10D 30/66:Vertical DMOS [VDMOS] FETs
H10D 62/10:Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
H10D 62/832:being Group IV materials comprising two or more elements, e.g. SiGe