It is possible to suppress an increase in a wire temperature of an auxiliary heater and to ensure the life of the auxiliary heater. There is provided a technique that includes: a first heater divided into a plurality of zones and configured to heat a process vessel in which a substrate is arranged; a second heater configured to assist in heating a specific zone among the plurality of zones by the first heater; a temperature sensor configured to detect a temperature of the second heater; and a controller configured to be capable of controlling an inner temperature of the process vessel to a target temperature by limiting an output of the second heater when the temperature detected by the temperature sensor is equal to or higher than a predetermined temperature lower than the target temperature.