/Substrate Processing Chamber With Plasma Confinement
Abstract

A plasma confinement screen system for a process chamber includes an inner plasma screen having an inner annular body with a central opening, the annular body including a plurality of first openings; and an outer plasma screen having an outer annular body with a central opening surrounding the inner plasma screen, the outer annular body including a plurality of second openings, wherein the outer plasma screen is configured for vertical movement relative to the inner plasma screen.

Full Text

What is claimed is:

A plasma confinement screen system for a process chamber includes an inner plasma screen having an inner annular body with a central opening, the annular body including a plurality of first openings; and an outer plasma screen having an outer annular body with a central opening surrounding the inner plasma screen, the outer annular body including a plurality of second openings, wherein the outer plasma screen is configured for vertical movement relative to the inner plasma screen.
Timeline
Filed
04/01/2026
Published
08/06/2026
Granted
Not Available
IPC Codes(1)
H01J 37/32:Gas-filled discharge tubes (heating by discharge H05B)