Abstract
A composite sensor is provided that includes a first substrate, a second substrate opposing the first substrate with a gap interposed therebetween, a first sealing frame that seals a first space between the first and second substrates, and a second sealing frame that seals a second space between the first and second substrate. In the composite sensor, an acceleration sensor is disposed in one of the first and second spaces and an angular velocity sensor is disposed in the other of the first and second spaces. Moreover, a degree of vacuum of the first space is different from that of the second space, and the first and second sealing frames are made of a eutectic alloy.
Full Text
What is claimed is:
A composite sensor is provided that includes a first substrate, a second substrate opposing the first substrate with a gap interposed therebetween, a first sealing frame that seals a first space between the first and second substrates, and a second sealing frame that seals a second space between the first and second substrate. In the composite sensor, an acceleration sensor is disposed in one of the first and second spaces and an angular velocity sensor is disposed in the other of the first and second spaces. Moreover, a degree of vacuum of the first space is different from that of the second space, and the first and second sealing frames are made of a eutectic alloy.
Timeline
Filed
04/01/2026Published
08/06/2026Granted
Not AvailableIPC Codes(2)
G01P 1/02:Housings
G01P 1/00:Details of instruments