Abstract
Disclosed are methods and systems for filling a gap. The methods and systems are useful, for example, in the field of integrated circuit manufacture.
Full Text
What is claimed is:
Disclosed are methods and systems for filling a gap. The methods and systems are useful, for example, in the field of integrated circuit manufacture.
Timeline
Filed
04/13/2026Published
08/13/2026Granted
Not AvailableIPC Codes(8)
H10P 14/60:of insulating materials
C23C 16/40:Oxides
C23C 16/455:characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber