/Semiconductor Memory Device
Abstract

A method of fabricating a semiconductor memory device comprises preparing a semiconductor substrate and insulating and active layers; forming a back-gate electrode in the active layer; patterning the active layer to form first and second active patterns on the insulating layer in a cell array region and to form a third active pattern on the insulating layer in a peripheral circuit region; forming bit lines; bonding a second substrate to the bit lines; removing the semiconductor substrate and the insulating layer; forming a peripheral gate electrode; forming a first interlayer insulating pattern to cover second surfaces of the first and second active patterns in the cell array region; forming a first etch stop layer to cover the first interlayer insulating pattern and the peripheral gate electrode with a uniform thickness; and forming a second interlayer insulating pattern on the first etch stop layer in the peripheral circuit region.

Full Text

What is claimed is:

A method of fabricating a semiconductor memory device comprises preparing a semiconductor substrate and insulating and active layers; forming a back-gate electrode in the active layer; patterning the active layer to form first and second active patterns on the insulating layer in a cell array region and to form a third active pattern on the insulating layer in a peripheral circuit region; forming bit lines; bonding a second substrate to the bit lines; removing the semiconductor substrate and the insulating layer; forming a peripheral gate electrode; forming a first interlayer insulating pattern to cover second surfaces of the first and second active patterns in the cell array region; forming a first etch stop layer to cover the first interlayer insulating pattern and the peripheral gate electrode with a uniform thickness; and forming a second interlayer insulating pattern on the first etch stop layer in the peripheral circuit region.
Timeline
Filed
04/13/2026
Published
08/13/2026
Granted
Not Available
IPC Codes(2)
H10B 12/00:Dynamic random access memory [DRAM] devices
H10W 20/41:characterised by their conductive parts