/Semiconductor Device And Method For Fabricating The Same
Abstract

A semiconductor device includes a gate trench formed in a substrate, a gate dielectric layer formed along profile of sidewalls and a bottom surface of the gate trench, first and second gate electrodes that are stacked over the gate dielectric layer to gap-fill a portion of the gate trench, a dipole inducing portion positioned between the second gate electrode and the gate dielectric layer and including a dipole bond and a non-dipole bond, and a capping layer suitable for gap-filling a remaining portion of the gate trench over the dipole inducing portion and the second gate electrode.

Full Text

What is claimed is:

A semiconductor device includes a gate trench formed in a substrate, a gate dielectric layer formed along profile of sidewalls and a bottom surface of the gate trench, first and second gate electrodes that are stacked over the gate dielectric layer to gap-fill a portion of the gate trench, a dipole inducing portion positioned between the second gate electrode and the gate dielectric layer and including a dipole bond and a non-dipole bond, and a capping layer suitable for gap-filling a remaining portion of the gate trench over the dipole inducing portion and the second gate electrode.
Timeline
Filed
04/15/2026
Published
08/20/2026
Granted
Not Available
IPC Codes(5)
H10D 64/01:Manufacture or treatment
H10D 64/27:Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
H10D 64/68:characterised by the insulator, e.g. by the gate insulator