Abstract
An aluminum nitride sintered body includes a plurality of crystal grains and a grain boundary. Each of the plurality of crystal grains contains aluminum nitride. The grain boundary is positioned between adjacent crystal grains among the plurality of crystal grains. The average grain size of the plurality of crystal grains is from 1.5 μm to 3.0 μm. The grain boundary includes a portion in which an aluminum oxynitride containing calcium is present in an isolated state. In the aluminum nitride sintered body, the content ratio of metal elements excluding aluminum is more than 30 ppm and 300 ppm or less.
Full Text
What is claimed is:
An aluminum nitride sintered body includes a plurality of crystal grains and a grain boundary. Each of the plurality of crystal grains contains aluminum nitride. The grain boundary is positioned between adjacent crystal grains among the plurality of crystal grains. The average grain size of the plurality of crystal grains is from 1.5 μm to 3.0 μm. The grain boundary includes a portion in which an aluminum oxynitride containing calcium is present in an isolated state. In the aluminum nitride sintered body, the content ratio of metal elements excluding aluminum is more than 30 ppm and 300 ppm or less.
Timeline
Filed
04/22/2026Published
08/27/2026Granted
Not AvailableIPC Codes(2)
C04B 35/581:based on aluminium nitride
H10P 72/72:using electrostatic chucks