Abstract
A waveguide-type visible and near-infrared photodetector structure and preparation method thereof are provided. The structure includes a dielectric layer, a cladding layer, an optical waveguide layer, an intermediate layer, and an electroabsorption layer from top to bottom; the electroabsorption layer and the dielectric layer are communicated through an optical-layer-to-electronic-layer via structure; the dielectric layer is made of a single-crystal or polycrystalline semiconductor material. The method enables the fabrication of a waveguide-type visible and near-infrared photodetector with large bandwidth and high sensitivity, and has the advantages of fewer process steps and a simple driving circuit design.
Full Text
What is claimed is:
A waveguide-type visible and near-infrared photodetector structure and preparation method thereof are provided. The structure includes a dielectric layer, a cladding layer, an optical waveguide layer, an intermediate layer, and an electroabsorption layer from top to bottom; the electroabsorption layer and the dielectric layer are communicated through an optical-layer-to-electronic-layer via structure; the dielectric layer is made of a single-crystal or polycrystalline semiconductor material. The method enables the fabrication of a waveguide-type visible and near-infrared photodetector with large bandwidth and high sensitivity, and has the advantages of fewer process steps and a simple driving circuit design.
Timeline
Filed
04/20/2026Published
08/27/2026Granted
Not AvailableIPC Codes(9)
H10F 71/00:Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F 19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F 19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F 39/00)
H10F 30/221:the potential barrier being a PN homojunction
H10F 30/223:the potential barrier being a PIN barrier