Abstract
A semiconductor production apparatus is a semiconductor production apparatus for producing a semiconductor, and includes an accommodated object installed inside an apparatus frame of the semiconductor production apparatus, and a holding member accommodated inside the apparatus frame together with the accommodated object and for holding the accommodated object. The holding member includes a base body, an attachment body attached to a lower portion of the accommodated object, and a lifting structure provided between the base body and the attachment body and for lifting the attachment body from the base body.
Full Text
What is claimed is:
A semiconductor production apparatus is a semiconductor production apparatus for producing a semiconductor, and includes an accommodated object installed inside an apparatus frame of the semiconductor production apparatus, and a holding member accommodated inside the apparatus frame together with the accommodated object and for holding the accommodated object. The holding member includes a base body, an attachment body attached to a lower portion of the accommodated object, and a lifting structure provided between the base body and the attachment body and for lifting the attachment body from the base body.
Timeline
Filed
04/20/2026Published
08/27/2026Granted
Not AvailableIPC Codes(1)
H10P 72/76:using mechanical means, e.g. clamps or pinches