/Array Level Packaged Uncooled Infrared Detector And Its Preparation Method
Abstract

An array level packaged uncooled infrared detector includes a read-out circuit substrate and active elements arranged on the upper surface of the read-out circuit substrate and electrically connected with the read-out circuit substrate. The array level packaged uncooled infrared detector also includes a getter deposition area. The array level packaged uncooled infrared detector opens up a separate area for the getter body, and deposits the getter body after the release of the structural sacrifice layer, avoiding the impact of high temperature and organic solution in the process of mems technology on the performance of the getter body, and adopts thermal activation. The activation mode of the getter body is simple, and it is easy to carry out batch production and manufacturing.

Full Text

What is claimed is:

An array level packaged uncooled infrared detector includes a read-out circuit substrate and active elements arranged on the upper surface of the read-out circuit substrate and electrically connected with the read-out circuit substrate. The array level packaged uncooled infrared detector also includes a getter deposition area. The array level packaged uncooled infrared detector opens up a separate area for the getter body, and deposits the getter body after the release of the structural sacrifice layer, avoiding the impact of high temperature and organic solution in the process of mems technology on the performance of the getter body, and adopts thermal activation. The activation mode of the getter body is simple, and it is easy to carry out batch production and manufacturing.
Timeline
Filed
05/13/2026
Published
08/27/2026
Granted
Not Available
IPC Codes(3)
G01J 5/24:Use of specially adapted circuits, e.g. bridge circuits
H10F 39/10:Integrated devices
H10F 71/00:Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F 19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F 19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F 39/00)