/Semiconductor Memory Devices Including Stepwise Profiles And Methods Of Fabricating The Same
Abstract

A method of fabricating a semiconductor memory device includes patterning a substrate to form a first active pattern and a second active pattern with a trench therebetween, forming a device isolation layer, forming a first source/drain region on the first active pattern and a second source/drain region on the second active pattern, etching the first source/drain region and the second source/drain region to form a first contact hole,—forming a conductive layer that fills the first contact hole, patterning the conductive layer to form a contact part, forming a lower spacer that covers a sidewall of the contact part and fills the first contact hole, forming a second contact hole, and filling the second contact hole with a conductive material to form a contact coupled to the second source/drain region.

Full Text

What is claimed is:

A method of fabricating a semiconductor memory device includes patterning a substrate to form a first active pattern and a second active pattern with a trench therebetween, forming a device isolation layer, forming a first source/drain region on the first active pattern and a second source/drain region on the second active pattern, etching the first source/drain region and the second source/drain region to form a first contact hole,—forming a conductive layer that fills the first contact hole, patterning the conductive layer to form a contact part, forming a lower spacer that covers a sidewall of the contact part and fills the first contact hole, forming a second contact hole, and filling the second contact hole with a conductive material to form a contact coupled to the second source/drain region.
Timeline
Filed
04/20/2026
Published
08/27/2026
Granted
Not Available
IPC Codes(1)
H10B 12/00:Dynamic random access memory [DRAM] devices