/Compensation Of Operationally Induced Thermal Deformations In The Manufacturing Process Of An Optical Element Under Thermal Control During Operation
Abstract
A method for producing an optical element (1) for an optical system, the optical element having a target surface shape (1a) and/or a target optical effect during the operation of the optical system. The optical element (1) has a mean operating temperature TX which during the operation of the optical system is controlled by at least one thermal manipulator (2). Also disclosed are an optical element for an optical system, and an optical system for a semiconductor technology apparatus.
Full Text
What is claimed is:
A method for producing an optical element (1) for an optical system, the optical element having a target surface shape (1a) and/or a target optical effect during the operation of the optical system. The optical element (1) has a mean operating temperature TX which during the operation of the optical system is controlled by at least one thermal manipulator (2). Also disclosed are an optical element for an optical system, and an optical system for a semiconductor technology apparatus.
Timeline
Filed
04/29/2026Published
09/03/2026Granted
Not AvailableIPC Codes(5)
G01B 11/255:for measuring radius of curvature
B29D 11/00:Producing optical elements, e.g. lenses or prisms
G02B 5/08:Mirrors