/Multi-tiered Semiconductor Waveguide And Multi-tiered Waveguide Heater
Abstract

An integrated chip including a base dielectric layer and a multi-tiered semiconductor waveguide layer over the base dielectric layer. The multi-tiered semiconductor waveguide layer has a first waveguide tier having a first width at a first height over the base dielectric layer. The multi-tiered semiconductor waveguide layer has a second waveguide tier having a second width, greater than the first width, at a second height, less than the first height, over the base dielectric layer. A cladding layer is over the multi-tiered semiconductor waveguide layer. A multi-tiered conductive heater layer is over the cladding layer. The multi-tiered conductive heater layer has a first heater tier over the first waveguide tier. The multi-tiered conductive heater layer has a pair of second heater tiers at the first height, over the second waveguide tier, and on opposite sides of the first waveguide tier.

Full Text

What is claimed is:

An integrated chip including a base dielectric layer and a multi-tiered semiconductor waveguide layer over the base dielectric layer. The multi-tiered semiconductor waveguide layer has a first waveguide tier having a first width at a first height over the base dielectric layer. The multi-tiered semiconductor waveguide layer has a second waveguide tier having a second width, greater than the first width, at a second height, less than the first height, over the base dielectric layer. A cladding layer is over the multi-tiered semiconductor waveguide layer. A multi-tiered conductive heater layer is over the cladding layer. The multi-tiered conductive heater layer has a first heater tier over the first waveguide tier. The multi-tiered conductive heater layer has a pair of second heater tiers at the first height, over the second waveguide tier, and on opposite sides of the first waveguide tier.
Timeline
Filed
04/27/2026
Published
09/03/2026
Granted
Not Available
IPC Codes(2)
G02B 6/12:of the integrated circuit kind (electric integrated circuits H10B, H10D 84/00, H10F 19/00, H10F 39/00, H10H 29/00, H10K 19/00, H10K 39/00, H10K 59/00, H10N 19/00, H10N 39/00, H10N 59/00, H10N 69/00, H10N 79/00, H10N 89/00)
G02F 1/025:in an optical waveguide structure (takes precedence G02F 1/017)