/Semiconductor Device
Abstract

Provided is a semiconductor device comprising a semiconductor substrate having an upper surface and a drift region, trench portions provided inwardly from the upper surface of the semiconductor substrate, mesa portions each being a region sandwiched between two of the trench portions; an emitter electrode, and an interlayer dielectric film with a contact hole formed, wherein the mesa portions include a channel mesa portion having a first conductivity type emitter region and a second conductivity type base region on the upper surface and connected to the emitter electrode by the contact hole, and a hole-extraction mesa portion with no channel formed and connected to the emitter electrode by the contact hole, and a first conductivity type first trench bottom region having a higher concentration than the drift region is provided at a lower end of at least one of the trench portions sandwiching the hole-extraction mesa portion.

Full Text

What is claimed is:

Provided is a semiconductor device comprising a semiconductor substrate having an upper surface and a drift region, trench portions provided inwardly from the upper surface of the semiconductor substrate, mesa portions each being a region sandwiched between two of the trench portions; an emitter electrode, and an interlayer dielectric film with a contact hole formed, wherein the mesa portions include a channel mesa portion having a first conductivity type emitter region and a second conductivity type base region on the upper surface and connected to the emitter electrode by the contact hole, and a hole-extraction mesa portion with no channel formed and connected to the emitter electrode by the contact hole, and a first conductivity type first trench bottom region having a higher concentration than the drift region is provided at a lower end of at least one of the trench portions sandwiching the hole-extraction mesa portion.
Timeline
Filed
05/22/2026
Published
09/17/2026
Granted
Not Available
IPC Codes(3)
H10D 12/00:Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
H10D 62/10:Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
H10D 62/60:Impurity distributions or concentrations