/Non-epitaxial Electrical Coupling Between A Front Side Trench Connector And Back Side Contacts Of A Transistor
Abstract

Embodiments described herein may be related to creating a low resistance electrical path within a transistor between a front side trench connector and back side contacts and/or metal layers of the transistor. The low resistance electrical path does not go through a fin of the transistor that includes epitaxial material, but rather may go through a conductive path that does not include an epitaxial material. Embodiments may be compatible with a self-aligned back side contact architecture, which does not rely on deep via patterning. Other embodiments may be described and/or shown.

Full Text

What is claimed is:

Embodiments described herein may be related to creating a low resistance electrical path within a transistor between a front side trench connector and back side contacts and/or metal layers of the transistor. The low resistance electrical path does not go through a fin of the transistor that includes epitaxial material, but rather may go through a conductive path that does not include an epitaxial material. Embodiments may be compatible with a self-aligned back side contact architecture, which does not rely on deep via patterning. Other embodiments may be described and/or shown.
Timeline
Filed
05/26/2026
Published
09/17/2026
Granted
Not Available
IPC Codes(4)
H10D 30/62:Fin field-effect transistors [FinFET]
H10D 84/01:Manufacture or treatment
H10D 84/03:using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology