/Three-dimensional Memory Devices And Methods For Forming The Same
Abstract

In certain aspects, a three-dimensional (3D) memory device includes a stack structure, and a slit structure extending. The stack structure includes interleaved conductive layers and dielectric layers. Edges of the interleaved conductive layers and dielectric layers define a staircase structure. Each one of the conductive layers has a thickened portion in the staircase structure. The thickened portion extends along a first direction. The slit structure extends through the stack structure and along a second direction perpendicular to the first direction, such that the slit structure cuts off at least one, but not all, of the thickened portions of the conductive layers.

Full Text

What is claimed is:

In certain aspects, a three-dimensional (3D) memory device includes a stack structure, and a slit structure extending. The stack structure includes interleaved conductive layers and dielectric layers. Edges of the interleaved conductive layers and dielectric layers define a staircase structure. Each one of the conductive layers has a thickened portion in the staircase structure. The thickened portion extends along a first direction. The slit structure extends through the stack structure and along a second direction perpendicular to the first direction, such that the slit structure cuts off at least one, but not all, of the thickened portions of the conductive layers.
Timeline
Filed
06/02/2026
Published
09/24/2026
Granted
Not Available
IPC Codes(4)
H10W 20/41:characterised by their conductive parts
H10B 41/27:the channels comprising vertical portions, e.g. U-shaped channels
H10B 43/27:the channels comprising vertical portions, e.g. U-shaped channels