Abstract
A plurality of purge nozzles of a purge load port include a nozzle gasket and a nozzle structure to inject a purging fluid into and through an internal chamber of a container (e.g., a FOUP) that is configured to, in operation, transport wafers or workpieces between various locations within a FAB. The nozzle gasket includes a deformable structure that abuts against a surface of a nozzle structure and a sealing structure opposite to the deformable structure that forms a seal between the container and the nozzle gasket. A nozzle hole of a nozzle of the nozzle structure includes a threaded region or portion that is configured to receive a threaded stopper structure to seal off the nozzle hole.
Full Text
What is claimed is:
A plurality of purge nozzles of a purge load port include a nozzle gasket and a nozzle structure to inject a purging fluid into and through an internal chamber of a container (e.g., a FOUP) that is configured to, in operation, transport wafers or workpieces between various locations within a FAB. The nozzle gasket includes a deformable structure that abuts against a surface of a nozzle structure and a sealing structure opposite to the deformable structure that forms a seal between the container and the nozzle gasket. A nozzle hole of a nozzle of the nozzle structure includes a threaded region or portion that is configured to receive a threaded stopper structure to seal off the nozzle hole.
Timeline
Filed
06/15/2026Published
10/01/2026Granted
Not AvailableIPC Codes(2)
B05B 1/00:Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means (, take precedence B05B 3/00, B05B 5/00, B05B 7/00; devices for applying liquids or other fluent materials to surfaces by contact B05C; nozzles for ink-jet printing mechanisms B41J 2/135; nozzles for liquid-dispensing, e.g. in vehicle service stations, B67D 7/42)
B05B 13/02:Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work (takes precedence B05B 13/06)