/Defect Inspection System Employing An Image Enhancing Model And A Defect Detection Model, And Method Of Using The Same
Abstract
A method includes patterning a hard mask over a target layer, capturing a low resolution image of the hard mask, and enhancing the low resolution image of the hard mask with a first machine learning model to produce an enhanced image of the hard mask. The method further includes analyzing the enhanced image of the hard mask with a second machine learning model to determine whether the target layer has defects.
Full Text
What is claimed is:
A method includes patterning a hard mask over a target layer, capturing a low resolution image of the hard mask, and enhancing the low resolution image of the hard mask with a first machine learning model to produce an enhanced image of the hard mask. The method further includes analyzing the enhanced image of the hard mask with a second machine learning model to determine whether the target layer has defects.
Timeline
Filed
06/17/2026Published
10/01/2026Granted
Not AvailableIPC Codes(6)
H10P 74/20:characterised by the properties tested or measured, e.g. structural or electrical properties
G01N 21/88:Investigating the presence of flaws, defects or contamination
G01N 21/95:characterised by the material or shape of the object to be examined (, take precedence G01N 21/89, G01N 21/94)