/Direct Bonding In Microelectronic Assemblies
Abstract

Disclosed herein are microelectronic assemblies including microelectronic components that are coupled together by direct bonding, as well as related structures and techniques. For example, in some embodiments, a microelectronic assembly may include a first microelectronic component; a second microelectronic component coupled to the first microelectronic component by a first direct bonding region, the first direct bonding region comprising first metal contacts and a first inorganic dielectric material between adjacent ones of the first metal contacts; and a third microelectronic component coupled to the second microelectronic component by a second direct bonding region, the second direct bonding region comprising second metal contacts and a second inorganic dielectric material between adjacent ones of the second metal contacts, wherein the second microelectronic component is between the first microelectronic component and the third microelectronic component.

Full Text

What is claimed is:

Disclosed herein are microelectronic assemblies including microelectronic components that are coupled together by direct bonding, as well as related structures and techniques. For example, in some embodiments, a microelectronic assembly may include a first microelectronic component; a second microelectronic component coupled to the first microelectronic component by a first direct bonding region, the first direct bonding region comprising first metal contacts and a first inorganic dielectric material between adjacent ones of the first metal contacts; and a third microelectronic component coupled to the second microelectronic component by a second direct bonding region, the second direct bonding region comprising second metal contacts and a second inorganic dielectric material between adjacent ones of the second metal contacts, wherein the second microelectronic component is between the first microelectronic component and the third microelectronic component.
Timeline
Filed
06/16/2026
Published
10/01/2026
Granted
Not Available
IPC Codes(5)
H10W 70/60:Insulating or insulated package substrates; Interposers; Redistribution layers (leadframes H10W 70/40)
H10W 70/63:Vias, e.g. via plugs
H10W 70/65:Shapes or dispositions of interconnections